You are cordially invited to attend the Sustainability Seminar organized by the Department of Chemistry.
Title : Scalable Engineering of Micro/Nanoscale Devices and Systems
Speaker: Murat Kaya Yapıcı, Faculty of Engineering and Natural Sciences, Sabancı University.
Date : Nov 16th, 2021, Tuesday
Time : 12:30
Join Zoom Meeting
Meeting ID: 729 064 5404
Around 1980s, following the advancements in semiconductor device fabrication technology, a new class of micro/nanoscale devices collectively referred to as micro/nano-electro-mechanical systems (MEMS/NEMS) emerged, whose functionality (unlike microelectronic devices or circuits) rely on a variety of physical principles including mechanical, chemical, thermal, optical, magnetic phenomena; as well as, exotic nanomaterials and fabrication techniques which are not typical in CMOS. This new class of functional micro/nano devices have already found applications in a variety of fields including consumer electronics, military, aerospace, medicine, biotechnology to name a few. The aim of this talk is to provide an overview of the different research activities ongoing in the Micro/Nano Devices & Systems Lab (SU-MEMS) where
we adopt a holistic approach in merging materials with novel nanofabrication techniques to frontier the development of functional devices with particular emphasis on their scalability and system-level integration.
I will highlight our existing capabilities to foster interdisciplinary research opportunities especially on topics like monolithic/heterogeneous integration, semiconductor process and materials integration for high performance devices (e.g. RF passives, graphene-enabled sensors) along with technology development in transfer-printing, tip-based nanofabrication; stress-induced self-assembly, and some snapshots on our efforts on biochips, flexible electronics, textile-based wearables.